The ion-assisted electron beam evaporation was used to fabricate laser diodes with tensile stress and compressive stress anti-reflective film coated on the front facet by changing the temperature of the substrate when preparing the Al₂O₃ film. The effects of two different anti-reflection coatings on the performance of laser diodes were compared. The results show that output power of the laser diode with tensile stress anti-reflective coating was 8.11W while the laser diode with compressive stress anti-reflective coating was 7.74W at 10A injection current. Therefore, fabricating tensile stress anti-reflective coated on the laser diode facet can more effectively increase the slope efficiency of laser diodes.