ReSe2薄膜的盐助生长及其光电特性研究
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(江南大学 物联网工程学院 电子工程系, 江苏 无锡 214122)

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余佳俊(1996-),男,安徽六安人,硕士生,从事二维半导体材料研究;

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国家自然科学基金项目(11704159);江苏省自然科学基金项目(BK20170167);中央高校基础研究基金项目(JUSRP51726B).*通信作者:肖少庆E-mail:xiaosq@jiangnan.edu.cn


Salt Assisted Growth and Photoelectric Properties of ReSe2 Thin Films
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(Department of Electronic Engineering, Internet of Things Engineering Institute, Jiangnan University, Wuxi 214122, CHN)

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    摘要:

    二硒化铼(ReSe2)因具有较好的红外光响应和各向异性特性而成为近年来的研究热点。采用盐辅助化学气相沉积技术,在SiO2/Si衬底上成功合成了大面积的单层ReSe2薄膜,其尺寸达到80μm。采用拉曼光谱(Raman)、光致发光光谱(PL)、原子力显微镜(AFM)和X射线光电子能谱(XPS)等手段对制备的ReSe2薄膜样品进行了形貌、光谱、厚度和元素成分的表征,结果表明所制备的ReSe2薄膜晶体质量高。基于单层ReSe2薄膜构筑了场效应晶体管,系统研究了其光电特性,结果显示器件的响应时间达毫秒级。

    Abstract:

    Recently, rhenium disselenide (ReSe2) has become a research hotspot due to its good infrared light response and anisotropic properties. Through the salt-assisted chemical vapor deposition technology, large-area monolayer ReSe2 films with a size of 80 microns were successfully synthesized on SiO2/Si substrates. The morphology, spectrum, thickness and element composition of ReSe2 films samples were analyzed by means of Raman spectroscopy (Raman), photoluminescence spectroscopy (PL), atomic force microscopy (AFM) and X-ray photoelectron spectroscopy (XPS), revealing that the as-prepared ReSe2 films have high crystal quality. Field-effect transistor photodetectors were fabricated based on the monolayer ReSe2 films and their photoelectric properties were systematically investigated, and the response time of millisecond level is achieved.

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余佳俊,钱叶铮,丁凯旋,李大庆,肖少庆. ReSe2薄膜的盐助生长及其光电特性研究[J].半导体光电,2021,42(2):259-263. YU Jiajun, QIAN Yezheng, DING Kaixuan, LI Daqing, XIAO Shaoqing. Salt Assisted Growth and Photoelectric Properties of ReSe2 Thin Films[J].,2021,42(2):259-263.

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  • 收稿日期:2020-11-30
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  • 在线发布日期: 2021-04-30
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