高温高斜率效率1060nm单模半导体激光器
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重庆光电技术研究所

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O436

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(小五号黑体,顶格)xxxxxx项目(111222333).(项目名称及编号:小五号宋体)


High-temperature High-slope-efficiency 1060nm Single-mode Semiconductor Laser
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Chongqing Optoelectronics Research Institute

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    摘要:

    1060nm半导体激光器在高能激光系统种子源、空间激光雷达等领域有广泛应用,受限于砷化镓体系InGaAs量子阱材料大应力,该波段激光器外延生长缺陷密度较高,且由于目前该波段激光器结构设计普遍采用窄波导结构,腔内损耗和非辐射复合水平较高,激光器斜率效率较低,高温特性较差。传统InGaAs压应变量子阱势垒高度较低加剧了激光器的高温特性劣化。本研究通过优化激光器外延生长条件并采用应变补偿量子阱结构和厚N包层结构,精确控制材料应力和势垒高度,降低腔内损耗,减小远场发散角,研制出一种高性能1060nm单模半导体激光器,斜率效率在85℃时依然超过0.9W/A。此外,通过引入DFB悬浮掩埋光栅结构实现了激光器波长锁定,斜率效率超过0.7W/A。

    Abstract:

    1060nm semiconductor lasers are widely applied in space LiDAR, high-energy laser systems and so on. Due to the high stress of InGaAs on GaAs substrate, 1060nm semiconductor lasers usually have large amount of defect. Besides, 1060nm semiconductor lasers always conduct thin waveguide layer for large confinement factor, which results in large cavity loss and non-radiation combination, so it leads to poor slope efficiency and high-temperature characteristics。Also,the conventional GaAs barrier cannot confine the carriers in the quantum well significantly, which degrades its performance when the operation temperature is high. In this paper, because the growth condition was optimized and stress-compensated quantum wells were applied, its stress and barrier height were well controlled. Enlarging the N cladding thickness also reduced the loss in the cavity. Consequently, we invented a high-performance 1060nm semiconductor laser, of which slope efficiency is as high as recorded 0.9W/A at both room and high temperature. Through the buried DFB grating, it also realized operation in single longitudinal mode with high slope efficiency of 0.7W/A.

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  • 收稿日期:2024-02-21
  • 最后修改日期:2024-02-21
  • 录用日期:2024-03-05
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