柔性硅光电晶体管性能的多物理场研究
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(电子科技大学 1.物理学院,成都 611731;2.长三角研究院(湖州),湖州 313001)

作者简介:

李选瑞(2001-),男,在读硕士研究生,主要研究方向为柔性硅光电晶体管;徐浩(1990-),男,博士,研究员,主要从事光电探测与传感研究。

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中图分类号:

TP212

基金项目:

四川省海聚计划项目(2024JDHJ0007);湖州市公益性应用研究项目(2024GZ52).


Multiphysics Study on the Performance of Flexible Silicon Phototransistors
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(1. School of Physics,Chengdu 611731,CHN;2. Yangtze Delta Region Institute(Huzhou), University of Electronic Science and Technology of China,Huzhou 313001,CHN)

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    摘要:

    柔性硅光电探测器凭借硅材料的天然优势,已成为智能穿戴、电子皮肤、折叠显示等柔性电子领域的核心元器件,但关于其在机械形变下的性能演变机制研究尚不充分。文章构建了“光-电-力”的多物理场耦合模型,系统研究不同有源层厚度(4.0~6.0 μm)的硅双极型光电晶体管(BJPT)在单轴拉伸弯曲条件下(曲率半径由平展至 10 mm)的光谱特性与光电瞬态响应。研究结果表明,器件的光电性能与抗机械疲劳能力之间存在 “厚度 -应变 ”平衡规律。较厚的 6.0 μm器件由于表面距离力学中性层更远,承受更剧烈的非均匀应变梯度,在 10 mm弯曲下光电流下降

    Abstract:

    Leveraging the inherent advantages of silicon,flexible silicon photodetectors have become core components in flexible electronics applications,such as smart wearables,electronic skins,and foldable displays. However,performance evolution mechanisms of puresilicon flexible optoelectronic devices under mechanical deformation remain insufficiently explored. In this work,a multiphysics coupling model encompassing “optical-electrical-mechanical” fields is established to systematically investigate the spectral characteristics and photoelectric transient responses of siliconbipolar junction phototransistors(BJPTs)with varying active layer thicknesses(4.0~6.0 μm)under uniaxial tensile bending conditions(curvature radii ranging from flat to 10 mm). The results reveal a “thickness-strain” tradeoff between the photoelectric performance and mechanical fatigue resistance of the devices. Thicker devices of 6. 0 μm thickness,whose surfaces are located farther from the neutral mechanical plane,experience nonuniform strain gradients. Under bending at a 10 mm radius,the photocurrent decreases by 16. 5%,and the on/off ratio drops by 46. 0% owing to a 55. 1% increase in defect-induced dark current. In contrast,devices with an active layer thickness of 4. 0 μm feature geometries closer to the neutral mechanical plane and release macroscopic lattice stress. Consequently, their photocurrent attenuation is limited to within 6. 0%, and the specific detectivity is maintained at Jones. This study revealed the physical mechanisms by which designs of varying thickness suppress asymmetric band distortion and defect accumulation, providing theoretical support for the development of highly reliable, stress-drift-resistant pure silicon flexible optoelectronic sensing systems.

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李选瑞,纳旺,崔凡,徐浩.柔性硅光电晶体管性能的多物理场研究[J].半导体光电,2026,47(4):607-615. LI Xuanrui, NA Wang, CUI Fan, XU Hao. Multiphysics Study on the Performance of Flexible Silicon Phototransistors[J].,2026,47(4):607-615.

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  • 收稿日期:2026-03-16
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  • 在线发布日期: 2026-08-25
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