近红外增强型硅基单光子探测器研究
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(重庆光电技术研究所,重庆 400060)

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黄建(1984-),男,重庆市人,博士,主要从事光电探测器研究。

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TN364

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Near-Infrared-Enhanced Silicon-Based Single-Photon Avalanche Diode Photodetector
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(Chongqing Optoelectronics Research Institute,Chongqing 400060,CHN)

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    摘要:

    文章以平面拉通型 SPAD结构为基础,利用 Silvaco、TFCalc等仿真软件,对增透膜、吸收层、有源区掺杂分布等进行优化,完成了近红外增强型硅基单光子探测器设计。在器件表面构建黑硅结构以增强近红外单光子探测效率;采用退火与吸杂工艺修复损伤并排除杂质,从而降低暗计数率;进一步采用基于硝酸 /氢氟酸 /磷酸 /硫酸混合溶液的湿法腐蚀工艺,实现黑硅近红外增强型硅单光子探测器制造。测试结果显示,该探测器的单光子探测效率在 905 nm处达到

    Abstract:

    This paper presents the design of a near-infrared(NIR)-enhanced silicon-based single-photon avalanche diode(SPAD)using simulation software like Silvaco and TFCalc. This design employs a planar reach-through SPAD structure and achieves NIR enhancement via the optimization of the antireflection coatings,absorption layer,and doping distribution within active region,among other factors. A black silicon structure is utilized to improve the NIR single-photon detection efficiency,whereas annealing and gettering processes are employed to repair the damage, remove impurities,and reduce the dark count rate. The black silicon NIR-enhanced silicon single-photon detector is fabricated by a wet etching process using a mixed solution of nitric acid, hydrofluoric acid,phosphoric acid,and sulfuric acid. Test results demonstrate that the detector achieves single-photon detection rates of 59. 8% and 13. 1% at 905 and 1 060 nm,respectively. Compared with devices lacking the integrated black silicon NIR enhancement structure,the proposed structure improves the detection rates by 42% and 336% at 905 and 1 060 nm,respectively. The dark count rates of the black silicon detector are less than 500 and 2 000 Hz at 263 and 293 K, respectively,comparable to that of a conventional planar SPAD. Owing to its process compatibility, the proposed NIR-enhanced technique has considerable potential for significantly improving the sensitivity of various photodetectors,including SPAD,dTOF-CIS,and SPM.

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黄建,郭安然,李睿智,马华平,刘丰豪.近红外增强型硅基单光子探测器研究[J].半导体光电,2026,47(4):616-621. HUANG Jian, GUO Anran, LI Ruizhi, MA Huaping, LIU Fenghao. Near-Infrared-Enhanced Silicon-Based Single-Photon Avalanche Diode Photodetector[J].,2026,47(4):616-621.

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  • 收稿日期:2026-03-01
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  • 在线发布日期: 2026-08-25
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