熔融流动对多脉冲飞秒激光加工 SiC烧蚀形貌的影响
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(江南大学 1.机械工程学院; 2.江苏省食品先进制造装备技术重点实验室,江苏无锡 214122)

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葛茗轩(2001-),男,硕士研究生,主要研究方向为飞秒激光加工碳化硅烧蚀形貌的影响机理研究;董淑宏(1988-),男,江苏省连云港市人,副教授,博导,主要研究方向为锂电池用真空镀膜设备研发。

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TN249

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Mechanism of Molten Flow on the Ablation Morphology of SiC Irradiated by Multi-Pulse Femtosecond Laser
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(1. School of Mechanical Engineering;2. Jiangsu Key Laboratory of Advanced Food Manufacturing Equipment and Technology,Jiangnan University,Wuxi 214122,CHN)

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    摘要:

    飞秒激光因其优异的加工质量,在微纳加工领域受到广泛关注。尽管已有实验观察到飞秒激光烧蚀 SiC过程中因熔融飞溅形成重铸层,但相关机理的理论建模仍较为匮乏。文章结合改进的多物理场耦合预测模型与实验表征,系统研究了多脉冲飞秒激光作用下熔体流动影响 SiC烧蚀形貌的演化机制。首先探究了 SiC的烧蚀阈值及其累积效应,随后通过系统调控脉冲数和激光能量密度揭示了多脉冲诱导下熔融材料的去除与再沉积的动态循环过程,并采用近阈值能量密度成功制备高质量微孔。经模拟与实验验证,该研究优化了脉冲能量分配,显著提升了烧蚀效率,为飞秒激光加工 SiC及其他宽禁带半导体材料提供了理论支撑与工艺参考。

    Abstract:

    The femtosecond laser has garnered extensive attention in the field of micro/nano fabrication owing to its superior processing quality. Although experimental observations have revealed the formation of recast layers caused by molten splashing during the femtosecond laser ablation of silicon carbide(SiC), theoretical modeling regarding the underlying mechanisms remains scarce. In this study,an improved multiphysics-coupled predictive model combined with experimental characterization was employed to systematically investigate the evolution mechanism of molten flow on SiC ablation morphology under multi-pulse irradiation. The ablation threshold and its accumulation effect in SiC were examined. The pulse number and laser fluence were modulated systematically, revealing the dynamic cycle of material removal and redeposition induced by multi-pulse irradiation,which enables the fabrication of high-quality micro-holes using near-threshold fluence. Furthermore, simulation and experimental validation facilitated the optimization of pulse energy distribution, resulting in a significant enhancement of ablation efficiency.

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葛茗轩,董淑宏.熔融流动对多脉冲飞秒激光加工 SiC烧蚀形貌的影响[J].半导体光电,2026,47(4):681-689. GE Mingxuan, DONG Shuhong. Mechanism of Molten Flow on the Ablation Morphology of SiC Irradiated by Multi-Pulse Femtosecond Laser[J].,2026,47(4):681-689.

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  • 收稿日期:2026-02-02
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  • 在线发布日期: 2026-08-25
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