基于激光参数与碳纳米管掺杂协同调控的 LIG导电性能研究
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(北京信息科技大学北京市传感器重点实验室,北京 102206)

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王嘉瑄(2001—),男,硕士研究生,主要研究方向为柔性传感器;朴林华(1970—),男,博士,教授,硕士研究生导师,主要研究方向 MEMS惯性传感器。

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TN249

基金项目:

国家自然科学基金资助项目(61771060);北京市教育委员会科研计划项目资助项目(KZ20231123221);北京市新世纪百千万人才工程培养资助项目(2019A20);现代测控技术教育部重点实验室资助项目(2024202101);北京信息科技大学北京市传感器重点实验室资助项目(2024202108).


Synergistic Modulation of Laser Parameters and Carbon Nanotube Doping for Enhanced Conductivity of Laser-Induced Graphene
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(Beijing Key Laboratory of Sensors,Beijing University of Information Science and Technology,Beijing 102206,CHN)

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    摘要:

    针对激光诱导石墨烯(LIG)导电性能优化问题,文章系统探究了激光参数调控与多壁碳纳米管(MWCNTs)原位掺杂对 LIG电阻特性及微观形貌的影响规律。实验结果表明:在 5~10 J/mm2能量密度范围内,LIG电阻值随激光能量密度增加显著降低,并在激光功率为 30 W、能量密度为 8 J/mm2条件下,所得 LIG电阻值最低,达到约 1 kΩ。采用 MWCNTs与聚酰胺酸(PAA)不同质量比进行原位掺杂后,SEM表征显示复合 LIG形成了更完善的协同导电网络,复合 LIG电阻值按一定规律显著降低,最低可达 0.5 kΩ,性能优于纯 LIG。基于此,进一步提出激光参数与掺杂协同调控的 LIG导电性能优化窗口,为高性能柔性电阻式应变传感器的制备提供了有效的工艺优化策略。

    Abstract:

    In this study,an approach towards the optimization of the electrical conductivity of laser-induced graphene(LIG)was investigated by systematically analyzing the effects of varying laser parameters and in-situ doping with multi-walled carbon nanotubes(MWCNTs)on the resistance characteristics and microstructure of LIG. The experimental results showed that the resistance of the LIG decreased as the laser energy density increased from 5 to 10 J/mm2. The minimum resistance of ~1 kΩ was obtained at a laser power of 30 W and an energy density of 8 J/mm2. After in-situ doping was performed with different mass ratios of MWCNTs to poly(amic acid)(PAA),scanning electron microscopy(SEM)revealed that the composite LIG formed a more complete conductive network. As a result,the resistance of the composite LIG was further reduced to a minimum of 0.5 kΩ,which is lower than that of pristine LIG. These findings indicated that an effective processing window could be established to optimize the conductivity of LIG by regulating the laser parameters and dopant content. Thus,this study provided a practical reference on the fabrication of LIG-based flexible resistive strain sensors and the optimization of their performance.

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王嘉瑄,朴林华,张永豪.基于激光参数与碳纳米管掺杂协同调控的 LIG导电性能研究[J].半导体光电,2026,47(4):696-702. WANG Jiaxuan, PIAO Linhua, ZHANG Yonghao. Synergistic Modulation of Laser Parameters and Carbon Nanotube Doping for Enhanced Conductivity of Laser-Induced Graphene[J].,2026,47(4):696-702.

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  • 收稿日期:2026-03-19
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  • 在线发布日期: 2026-08-25
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