Abstract:The MEMS (Micro-Electro-Mechanical System) HRG(Hemispherical Resonator Gyroscope) as a kind of MEMS gyroscopes is a research hotspot, which can work in the RIG (Rate-Integrating-Gyroscope) mode. The emergence of MEMS gyroscopes has produced sensors with smaller size, lower cost, lighter weight, less consuming power, high symmetry, high Q-factor and high accuracy than previous solutions. In this paper, the structure of a MEMS HRG was proposed and the working principles and detection methods were studied. In order to accomplish the work of control and detection of MEMS RIG mode for MEMS HRG, a digital scheme for the MEMS RIG with hemispherical resonator was developed and a FPGA platform was designed.